conference paper
Active and self-detecting cantilever with on-chip CMOS electronics for scanning force microscopy
1999
Transducers'99 10th Internat. Conf. on Solid-State Sensors and Actuators
Type
conference paper
Author(s)
Date Issued
1999
Published in
Transducers'99 10th Internat. Conf. on Solid-State Sensors and Actuators
Start page
1848
End page
1851
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record