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  4. Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling
 
research article

Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling

Parsapour, Faze  
•
Pashchenko, Vladimir  
•
Kurz, Nicolas
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May 1, 2019
Advanced Electronic Materials

Accurate property determination of the piezoelectric thin film material Al(1-x)Sc(x)N is necessary for designing the next generation of radio frequency resonators in mobile communication, and for testing results of ab initio calculations. Sound velocity and piezoelectric coupling of both longitudinal and shear mode are evaluated from a single dual mode resonator. This assures a compatible set of coefficients. It is observed that AlScN thin films grew differently on small, isolated bottom electrodes. The investigated film starts growing with a slightly tilted, c-textured microstructure, and switches after 200 nm to a polycrystalline film with irregularly oriented grains having c-axis tilt angles in the range of 35 degrees-70 degrees, as revealed by transmission electron microscope nanodiffraction mapping. Based on this information, a finite element model (FEM) is constructed that properly reproduces the resonance behavior of the resonator. The relevant elastic and piezoelectric constants are derived by curve fitting and yield somewhat lower stiffness and higher piezoelectric coefficients than ab initio calculations published in the literature. The FEM modeling results show that the upper film part with the abnormally oriented grains is overall piezoelectric, i.e., the misoriented grains maintain the polarity projected onto the growth direction from the starting layer.

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Type
research article
DOI
10.1002/aelm.201800776
Web of Science ID

WOS:000471812600006

Author(s)
Parsapour, Faze  
Pashchenko, Vladimir  
Kurz, Nicolas
Sandu, Cosmin Silviu  
LaGrange, Thomas  
Yamashita, Kaoru
Lebedev, Vadim
Muralt, Paul  
Date Issued

2019-05-01

Publisher

WILEY

Published in
Advanced Electronic Materials
Volume

5

Issue

5

Article Number

1800776

Subjects

Nanoscience & Nanotechnology

•

Materials Science, Multidisciplinary

•

Physics, Applied

•

Science & Technology - Other Topics

•

Materials Science

•

Physics

•

alscn

•

elastic constants

•

nanodiffraction mapping

•

piezoelectric constants

•

thin film

•

bulk acoustic resonators

•

filters

•

growth

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
CIME  
Available on Infoscience
July 4, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/158815
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