A self-limiting dielectrophoresis technique, aimed at deterministically assembling individual or bundles of single-walled carbon nanotubes (SWCNTs) and multiwalled carbon nanotubes (MWCNTs), is experimentally investigated. A limiting resistor is used to control the electric field after the deposition of a single carbon nanotube. The role of some key parameters such as voltage and duration of the deposition with and without the limiting resistor is studied.