conference paper
XY-stage for alignment of optical elements in MOEMS
1998
Microelectronic Structures and MEMS for Optical Processing IV
Type
conference paper
Author(s)
Date Issued
1998
Published in
Microelectronic Structures and MEMS for Optical Processing IV
Series title/Series vol.
Proc. SPIE; 3513
Start page
202
End page
205
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
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