research article

Platinum spots on silicon deposited by photon induced chemical vapor deposition

Garrido, C.
•
Leon, B.
•
Perez-Amor, M.
Show more
1989
AIP Conference Proceedings

Laser induced photolytic and pyrolytic deposition spots on silicon are studied for different laser powers, partial pressure and deposition time. In the photolytic case at low powers, the reaction takes place in the adsorbed phase on the surface, whereas at higher powers it is a predominantly gas phase process. Schottky diodes have been tested to demonstrate the good quality of platinum deposits.

Type
research article
DOI
10.1063/1.38655
Author(s)
Garrido, C.
Leon, B.
Perez-Amor, M.
Braichotte, D.
Van den Bergh, H.  
Date Issued

1989

Published in
AIP Conference Proceedings
Volume

191

Issue

1

Start page

439

End page

441

Subjects

7440-06-4 (Platinum) Role: PEP (Physical

•

engineering or chemical process)

•

PROC (Process) (photolytic and pyrolytic deposition of

•

on silicon

•

chem.-vapor); 65353-51-7 (Platinum bis-hexafluoroacetyl-acetonate) Role: USES (Uses) (platinum chem. vapor de

•

Schottky diode laser processing quality; photolytic platinum deposition CVD; pyrolytic platinum deposition CVD; silicon platinum deposition photolytic pyrolytic

Note

Copyright 2003 ACS

CAPLUS

AN 1989:645482

CAN 111:245482

76-3

Electric Phenomena

66, 74

Appl. Phys. Dep.,Univ. Santiago,Vigo,Spain. FIELD URL:

Journal

APCPCS

written in English.

Diodes (Schottky, platinum on silicon, photolytic and pyrolytic chem.-vapor deposition in fabrication of)

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPAS  
Available on Infoscience
February 1, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/63671