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  4. Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process
 
research article

Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

Li, Yingying
•
Worsey, Elliott
•
Bleiker, Simon J.
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October 13, 2023
Nanoscale

Integrated nanoelectromechanical (NEM) relays can be used instead of transistors to implement ultra-low power logic circuits, due to their abrupt turn off characteristics and zero off-state leakage. Further, realizing circuits with 4-terminal (4-T) NEM relays enables significant reduction in circuit device count compared to conventional transistor circuits. For practical 4-T NEM circuits, however, the relays need to be miniaturized and integrated with high-density back-end-of-line (BEOL) interconnects, which is challenging and has not been realized to date. Here, we present electrostatically actuated silicon 4-T NEM relays that are integrated with multi-layer BEOL metal interconnects, implemented using a commercial silicon-on-insulator (SOI) foundry process. We demonstrate 4-T switching and the use of body-biasing to reduce pull-in voltage of a relay with a 300 nm airgap, from 15.8 V to 7.8 V, consistent with predictions of the finite-element model. Our 4-T NEM relay technology enables new possibilities for realizing NEM-based circuits for applications demanding harsh environment computation and zero standby power, in industries such as automotive, Internet-of-Things, and aerospace.

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Type
research article
DOI
10.1039/d3nr03429a
Web of Science ID

WOS:001085474400001

Author(s)
Li, Yingying
Worsey, Elliott
Bleiker, Simon J.
Edinger, Pierre
Kulsreshath, Mukesh Kumar
Tang, Qi
Takabayashi, Alain Yuji  
Quack, Niels  
Verheyen, Peter
Bogaerts, Wim
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Date Issued

2023-10-13

Publisher

Royal Soc Chemistry

Published in
Nanoscale
Volume

15

Issue

43

Start page

17335

End page

17341

Subjects

Physical Sciences

•

Technology

•

Reliability

•

Technology

•

Design

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

FunderGrant Number

Support from the European Unionapos;s Horizon 2020 research and innovation program under grant agreement No. 780283 (MORPHIC) and No. 871740 (ZeroAMP) is gratefully acknowledged. The authors acknowledge the support of the EPFL Center of MicroNanoTechnolog

780283

European Unionapos;s Horizon 2020 research and innovation program

Available on Infoscience
February 16, 2024
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/203886
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