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conference paper
Copper TSV-Based Die-Level Via-Last 3D Integration Process with Parylene-C Adhesive Bonding Technique
2016
2016 IEEE International 3D Systems Integration Conference (3DIC)
This paper presents a die-level post-CMOS processing protocol for multi-layer homogeneous 3D integration with adhesive bonding technique using parylene-C as an intermediate bonding layer and sidewall passivation material. This protocol was used to fabricate 4-layer CMOS memory chip stacks, which were then packaged and tested using time domain reflectometry (TDR) measurement technique. The results have showed that the characteristic inductance values were improved for 3D integrated memory chips due to the elimination of bonding wires.
Type
conference paper
Authors
Publication date
2016
Published in
2016 IEEE International 3D Systems Integration Conference (3DIC)
Start page
1
End page
5
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
San Francisco, California, USA | November 9-11, 2016 | |
Available on Infoscience
November 30, 2016
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