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research article

MEMS Tunable Mid-Infrared Plasmonic Spectrometer

Stark, Thomas
•
Imboden, Matthias  
•
Kaya, Sabri
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2016
Acs Photonics

We present a microelectromechanical systems (MEMS) tunable metamaterial, Fabry-Perot interferometer with a widely tunable mid-infrared response. An array of subwavelength holes in a gold film is suspended above a gold reflector, forming an interferometer cavity whose length can be modulated over a range of 1.7 to 21.67 mu m using MEMS electrostatic actuation. Reflectance spectra exhibit the convolution of extraordinary optical transmission through the holes and Fabry-Perot resonances with free spectral ranges from 2900 to 230.7 cm(-1). Measuring the free spectral range enables us to perform in situ interferometric calibration of the cavity length. We present a simple analytical model that describes the experimental and simulated results. This device shows promise as a surface-enhanced sensing substrate with a tunable spectral response.

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Type
research article
DOI
10.1021/acsphotonics.5b00290
Web of Science ID

WOS:000368567500003

Author(s)
Stark, Thomas
Imboden, Matthias  
Kaya, Sabri
Mertiri, Alket
Chang, Jackson
Erramilli, Shyamsunder
Bishop, David
Date Issued

2016

Publisher

Amer Chemical Soc

Published in
Acs Photonics
Volume

3

Issue

1

Start page

14

End page

19

Subjects

metamaterials

•

plasmonics

•

extraordinary optical transmission

•

microelectromechanical systems

•

Fabry-Perot

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
IMT  
Available on Infoscience
February 16, 2016
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/123776
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