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  4. Analysis of local deformation effects in resistive strain sensing of a submicron-thickness AFM cantilever
 
conference paper

Analysis of local deformation effects in resistive strain sensing of a submicron-thickness AFM cantilever

Adams, Jonathan D.
•
Schwalb, Christian H.
•
Winhold, Marcel
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Schmid, U.
•
Sánchez de Rojas Aldavero, J. L.
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2013
Smart Sensors, Actuators, And MEMS VI
SPIE Conference on Smart Sensors, Actuators, and MEMS VI

Incorporating resistive strain-sensing elements into MEMS devices is a long-standing approach for electronic detection of the device deformation. As the need for more sensitivity trends the device dimensions downwards, the size of the strain-sensor may become comparable to the device size, which can have significant impact on the mechanical behaviour of the device. To study this effect, we modelled a submicron-thickness silicon nitride AFM cantilever with strain-sensing element. Using finite element analysis, we calculated the strain in the sensor elements for a deflected cantilever. The sensor element contributes to a local stiffening effect in the device structure which lowers the strain in the sensor. By varying the sensor geometry, we investigated the degree to which this effect impacts the strain. Minimizing the sensor size increases the strain, but the reduction in sensor cross-sectional area increases the resistance and expected sensor noise. The optimal sensor geometry must therefore account for this effect. We used our analysis to optimize geometric variations of nanogranular tunnelling resistor (NTR) strain sensors arranged in a Wheatstone bridge on a silicon nitride AFM cantilever. We varied the dimensions of each sensor element to maintain a constant cross-sectional area but maximize the strain in the sensor element. Through this approach, we expect a 45% increase in strain in the sensor and corresponding 20% increase in the Wheatstone bridge signal. Our results provide an important consideration in the design geometry of resistive strain-sensing elements in MEMS devices.

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Type
conference paper
DOI
10.1117/12.2018034
Web of Science ID

WOS:000323607500067

Author(s)
Adams, Jonathan D.
Schwalb, Christian H.
Winhold, Marcel
Dukic, Maja  
Huth, Michael
Fantner, Georg E.  
Editors
Schmid, U.
•
Sánchez de Rojas Aldavero, J. L.
•
Leester-Schaedel, M.
Date Issued

2013

Publisher

SPIE

Publisher place

Bellingham

Published in
Smart Sensors, Actuators, And MEMS VI
ISBN of the book

978-0-8194-9560-0

Total of pages

8

Series title/Series vol.

Proceedings of SPIE

Volume

8763

Issue

27

Subjects

Microcantilever

•

atomic force microscopy

•

self-sensing cantilever

•

resistive strain sensing

•

nanogranular tunnelling resistor

•

finite element analysis

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LBNI  
Event nameEvent placeEvent date
SPIE Conference on Smart Sensors, Actuators, and MEMS VI

Grenoble, France

April 24-26, 2013

Available on Infoscience
October 1, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/95874
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