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  4. An experimental investigation of the surface potential in ferroelectric P(VDF-TrFE) FETs
 
conference paper

An experimental investigation of the surface potential in ferroelectric P(VDF-TrFE) FETs

Rusu, Alexandru  
•
Salvatore, Giovanni
•
Ionescu, Adrian  
2010
Microelectronic Engineering
35th International Conference on Micro-and Nano-Engineering

In this paper we report the fabrication and detailed electrical characterization of a ferroelectric transistor (Fe-FET) aiming at the extraction of its physical threshold voltage. The investigated transistors are fabricated on doped bulk silicon with a gate stack including 10 nm silicon dioxide, 40 nm P(VDF-TrFE) and Au. Based on capacitive measurements, a capacitive divider circuit and a long-channel MOSFET model, we subsequently extract the surface potential psi(S) dependence on the gate voltage and the physical threshold voltage. The experimental data suggest a more abrupt d psi(S)/dV(g) slope, compared with a conventional transistor. A hysteretic behavior, due to the polarization of the P(VDF-TrFE), is observed in the psi(S)-V-g characteristics. (C) 2009 Elsevier B.V. All rights reserved.

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Type
conference paper
DOI
10.1016/j.mee.2009.10.047
Web of Science ID

WOS:000276300700237

Author(s)
Rusu, Alexandru  
Salvatore, Giovanni
Ionescu, Adrian  
Date Issued

2010

Published in
Microelectronic Engineering
Volume

87

Start page

1607

End page

1609

Subjects

Pvdf

•

Ferroelectric

•

Fet

•

Ferroelectric

•

Capacitance

•

Fabrication

•

Electrical characterization

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Event nameEvent placeEvent date
35th International Conference on Micro-and Nano-Engineering

Ghent, BELGIUM

Sep 28-Oct 01, 2009

Available on Infoscience
December 16, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/75629
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