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research article

Thick GaN growth via GaN nanodot formation by HVPE

Lee, Moonsang
•
Mikulik, Dmitry
•
Park, Sungsoo
2017
Crystengcomm

We demonstrate a 400 mu m-thick GaN layer on 4 inch (0001) Al2O3 substrates through GaN nanodot formation as a seed for stress relaxation layers, which were formed by an in situ special surface treatment using HVPE. The size and density of the GaN nanodots determined the thickness of the stress relaxation layers and the structural properties of thick GaN. The 400 mu m-thick GaN layer exhibits a smooth surface and high crystal quality with FWHM of 104 arcsec and 163 arcsec in the (002) and (102) X-ray rocking curves, respectively. The dislocation density estimated via micro-PL measurements was 2 x 10(6) cm(-2). This can provide an efficient and simple way to fabricate thick GaN layers on an Al2O3 substrate without ex situ buffer layer formation or additional complicated processes.

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Type
research article
DOI
10.1039/c6ce02125e
Web of Science ID

WOS:000395628200006

Author(s)
Lee, Moonsang
Mikulik, Dmitry
Park, Sungsoo
Date Issued

2017

Publisher

Royal Soc Chemistry

Published in
Crystengcomm
Volume

19

Issue

6

Start page

930

End page

935

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
IMX  
Available on Infoscience
May 1, 2017
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/136712
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