Precision micro-mechanical components in single crystal diamond by deep reactive ion etching

research article

Toros, A

•

Kiss, M

•

Graziosi, T

2018

Name

s41378-018-0014-5.pdf

Type

Publisher's Version

Version

http://purl.org/coar/version/c_970fb48d4fbd8a85

Access type

openaccess

License Condition

CC BY

Size

2.13 MB

Format

Adobe PDF

Checksum (MD5)

5489df83914867b080cf098847e8d113