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  4. Improved Split CV Mobility Extraction in 28 nm Fully Depleted Silicon on Insulator Transistors
 
research article

Improved Split CV Mobility Extraction in 28 nm Fully Depleted Silicon on Insulator Transistors

Morelle, Alban  
•
Vandermolen, Eric
•
Kilchytska, Valeriya
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May 1, 2021
IEEE Electron Device Letters

In this work, we assess the applicability of the well-known split CV technique for mobility extraction in 28 nm FDSOI transistors with gate length down to 25 nm using TCAD simulations. We identify the significant bias dependence of the parasitic source/drain resistance and the contribution of the inner fringing capacitance as the main sources of error in the conventional split CV extraction. An improved split CV method, correcting for these parasitics, is demonstrated to accurately extract the effective mobility and its dependence on the gate voltage for devices down to 25 nm gate length. Measurements on 28 FDSOI transistors confirm the insights from the TCAD simulations.

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Type
research article
DOI
10.1109/LED.2021.3065002
Web of Science ID

WOS:000645061400005

Author(s)
Morelle, Alban  
Vandermolen, Eric
Kilchytska, Valeriya
Raskin, Jean-Pierre
Flandre, Denis
Date Issued

2021-05-01

Publisher

Institute of Electrical and Electronics Engineers

Published in
IEEE Electron Device Letters
Volume

42

Issue

5

Start page

661

End page

664

Subjects

Engineering, Electrical & Electronic

•

Engineering

•

logic gates

•

capacitance

•

transistors

•

silicon-on-insulator

•

interpolation

•

resistance

•

voltage measurement

•

fdsoi

•

utbb

•

split cv

•

effective mobility

•

short-channel

•

mosfets

Editorial or Peer reviewed

REVIEWED

Written at

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May 22, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/178214
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