Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Single crystal diamond micro-disk resonators by focused ion beam milling
 
research article

Single crystal diamond micro-disk resonators by focused ion beam milling

Graziosi, Teodoro  
•
Mi, Sichen  
•
Kiss, Marcell  
Show more
December 1, 2018
Apl Photonics

We report on single crystal diamond micro-disk resonators fabricated in bulk chemical vapor deposition diamond plates (3 mm x 3 mm x 0.15 mm) using a combination of deep reactive ion etching and Focused Ion Beam (FIB) milling. The resulting structures are micro-disks of few mu m in diameter and less than 1 mu m thick, supported by a square or diamond section pillar resulting from the multi-directional milling. Thin aluminum and chromium layers are used to ground the substrate, limit the ion implantation, and prevent edge rounding and roughening. FIB damage is then removed by a combination of hydrofluoric acid etching, oxygen plasma cleaning, and annealing at 500 degrees C for 4 h in air. We experimentally characterize the optical behavior of the devices by probing the transmission of a tapered fiber evanescently coupled to the micro-disk, revealing multiple resonances with a quality factor up to 5700 in the S- and C-band. (c) 2018 Author(s).

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

1.5051316.pdf

Type

Publisher

Version

Published version

Access type

openaccess

License Condition

CC BY

Size

1.9 MB

Format

Adobe PDF

Checksum (MD5)

712dad0fa715f6dd0988e3b05a20cf75

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés