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research article

In-situ grown horizontal carbon nanotube membrane

Guerin, Hoel
•
Tsamados, Dimitrios
•
Le Poche, Helene
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2012
Microelectronic Engineering

We present the successful fabrication of horizontally grown and dense carbon nanotube (CNT) membranes in situ. A TiN/Al2O3/TiN stack is first patterned to be employed as a support for the CNT growth. Iron is then evaporated with a 45 degrees tilt angle on the stack's vertical sidewall as a catalyst material. With the use of a material selective chemical vapor deposition (CVD) growth process, dense and thin arrays of horizontally aligned CNTs are directly grown on site, from the Al2O3/Fe surface. This process enables for the wafer scale integration of dense CNT membranes as basic building blocks in devices such as micro-electromechanical systems (MEMS) for gas sensing applications. These CNT membranes, when contacted in between interdigitated electrodes over a third buried electrode, can be expected to show enhanced sensitivity for potential gas identification sensor systems due to their large detection surface and enhanced selectivity due to potential "signature" multiple readouts of target molecules interactions with the CNT membrane. (C) 2012 Elsevier B.V. All rights reserved.

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Type
research article
DOI
10.1016/j.mee.2012.05.017
Web of Science ID

WOS:000309316300040

Author(s)
Guerin, Hoel
•
Tsamados, Dimitrios
•
Le Poche, Helene
•
Dijon, Jean
•
Ionescu, Adrian M.  
Date Issued

2012

Publisher

Elsevier

Published in
Microelectronic Engineering
Volume

97

Start page

166

End page

168

Subjects

Carbon nanotube membrane

•

Horizontal and selective CVD growth

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Available on Infoscience
February 27, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/89538
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