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research article

Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch

Takabayashi, Alain Yuji  
•
Sattari, Hamed  
•
Edinger, Pierre
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April 1, 2021
Journal of Microelectromechanical Systems

Photonic Integrated Circuits (PICs) benefit from the technology advances in the semiconductor industry to incorporate an ever-increasing number of photonic components on a single chip to create large-scale photonic integrated circuits. We here present a broadband, compact and low-loss Silicon Photonic MEMS switch based on a Single-Pole Double- Throw (SPDT) architecture, where curved electrostatic actuators mechanically displace a movable input waveguide to redirect the optical signal on chip efficiently to either of two output waveguides. The photonic switch has been fabricated in an established silicon photonics technology platform with custom MEMS release post-processing. With a compact footprint of 65 x 62 mu m(2), the switch exhibits an extinction ratio exceeding 23 dB over 70 nm optical bandwidth, a low insertion loss and a fast response time below 1 mu s, meeting the requirements for integration in large-scale reconfigurable Photonic Integrated Circuits. [2020-0391]

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Type
research article
DOI
10.1109/JMEMS.2021.3060182
Web of Science ID

WOS:000638400700018

Author(s)
Takabayashi, Alain Yuji  
Sattari, Hamed  
Edinger, Pierre
Verheyen, Peter
Gylfason, Kristinn B.
Bogaerts, Wim
Quack, Niels  
Date Issued

2021-04-01

Publisher

Institute of Electrical and Electronics Engineers

Published in
Journal of Microelectromechanical Systems
Volume

30

Issue

2

Start page

322

End page

329

Subjects

Engineering, Electrical & Electronic

•

Nanoscience & Nanotechnology

•

Instruments & Instrumentation

•

Physics, Applied

•

Engineering

•

Science & Technology - Other Topics

•

Physics

•

optical waveguides

•

optical switches

•

photonics

•

couplings

•

optical coupling

•

electrodes

•

silicon

•

microelectromechanical systems

•

photonic integrated circuits

•

silicon photonics

•

optical switch

Editorial or Peer reviewed

REVIEWED

Written at

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May 22, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/178276
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