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  4. The key impact of incorporated Al2O3 barrier layer on W-based ReRAM switching performance
 
conference paper

The key impact of incorporated Al2O3 barrier layer on W-based ReRAM switching performance

Shahrabi, Elmira  
•
Giovinazzo, Cecilia  
•
Sandrini, Jury  
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January 1, 2018
2018 14Th Conference On Phd Research In Microelectronics And Electronics (Prime 2018)
15th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD) / 14th Conference on PhD Research in Microelectronics and Electronics (PRIME)

In this article, we inspected the bipolar resistive switching behavior of W-based ReRAMs, using HfO2 as switching layer. We have shown that the switching properties can be significantly enhanced by incorporating an Al2O3 layer as a barrier layer. It stabilizes the resistance states and lowers the operating current. Al2O3 acts as an oxygen scavenging blocking layer at W sides, results in the filament path constriction at the Al2O3/HfO2 interface. This leads to the more controllable reset operation and consecutively the HRS properties improvement. This allows the W/Al2O3/HfO2/Pt to switch at 10 times lower operating current of 100 mu A and 2 times higher memory window compared to the W/HfO2/Pt stacks. The LRS conduction of devices with the barrier layer is in perfect agreement with the Poole-Frenkel model.

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Type
conference paper
DOI
10.1109/PRIME.2018.8430371
Web of Science ID

WOS:000495592400018

Author(s)
Shahrabi, Elmira  
Giovinazzo, Cecilia  
Sandrini, Jury  
Leblebici, Yusuf  
Date Issued

2018-01-01

Publisher

IEEE

Publisher place

New York

Published in
2018 14Th Conference On Phd Research In Microelectronics And Electronics (Prime 2018)
ISBN of the book

978-1-5386-5386-9

Start page

69

End page

72

Subjects

Engineering, Electrical & Electronic

•

Telecommunications

•

Engineering

•

reram

•

tungsten

•

aluminum oxide

•

barrier layer

•

resistive switching

•

devices

•

memory

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LSM  
LMIS1  
Event nameEvent placeEvent date
15th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD) / 14th Conference on PhD Research in Microelectronics and Electronics (PRIME)

Prague, CZECH REPUBLIC

Jul 02-05, 2018

Available on Infoscience
November 26, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/163378
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