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research article

Standard-free composition measurements of AlxIn1-xN by low-loss electron energy loss spectroscopy

Palisaitis, Justinas
•
Hsiao, Ching-Lien
•
Junaid, Muhammad
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2011
Physica Status Solidi-Rapid Research Letters

We demonstrate a standard-free method to retrieve compositional information in AlxIn1-xN thin films by measuring the bulk plasmon energy (E-p), employing electron energy loss spectroscopy (EELS) in a scanning transmission electron microscope (STEM). Two series of samples were grown by magnetron sputter epitaxy (MSE) and metal organic vapor phase epitaxy (MOVPE), which together cover the full compositional range 0 <= x <= 1. Complementary compositional measurements were obtained using Rutherford backscattering spectroscopy (RBS) and the lattice parameters were obtained by X-ray diffraction (XRD). It is shown that E-p follows a linear relation with respect to composition and lattice parameter between the alloying elements from AlN to InN allowing for straightforward compositional analysis. (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

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Type
research article
DOI
10.1002/pssr.201004407
Web of Science ID

WOS:000288178300002

Author(s)
Palisaitis, Justinas
Hsiao, Ching-Lien
Junaid, Muhammad
Xie, Mengyao
Darakchieva, Vanya
Carlin, Jean-Francois  
Grandjean, Nicolas  
Birch, Jens
Hultman, Lars
Persson, Per O. A.
Date Issued

2011

Published in
Physica Status Solidi-Rapid Research Letters
Volume

5

Start page

50

End page

52

Subjects

AlInN

•

low-loss EELS

•

thin films

•

compositional analysis

•

Eels

•

Stem

•

Inn

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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December 16, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/74355
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