From Amorphous to Microcrystalline Silicon Films Prepared by Hydrogen Dilution Using the VHF(70MHz) GD Technique

research article

From Amorphous to Microcrystalline Silicon Films Prepared by Hydrogen Dilution Using the VHF(70MHz) GD Technique

Kroll, U.

•

Meier, J.

•

Torres, P.

1998

Journal of Non-Crystalline Solids

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