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  4. Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase
 
research article

Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase

Edinger, Pierre
•
Jo, Gaehun
•
Nguyen, Chris Phong Van
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February 13, 2023
Optics Express

Ring resonators are a vital element for filters, optical delay lines, or sensors in silicon photonics. However, reconfigurable ring resonators with low-power consumption are not available in foundries today. We demonstrate an add-drop ring resonator with the independent tuning of round-trip phase and coupling using low-power microelectromechanical (MEMS) actuation. At a wavelength of 1540 nm and for a maximum voltage of 40 V, the phase shifters provide a resonance wavelength tuning of 0.15 nm, while the tunable couplers can tune the optical resonance extinction ratio at the through port from 0 to 30 dB. The optical resonance displays a passive quality factor of 29 000, which can be increased to almost 50 000 with actuation. The MEMS rings are individually vacuum-sealed on wafer scale, enabling reliable and long-term protection from the environment. We cycled the mechanical actuators for more than 4 x 109 cycles at 100 kHz, and did not observe degradation in their response curves. On mechanical resonance, we demonstrate a modulation increase of up to 15 dB, with a voltage bias of 4 V and a peak drive amplitude as low as 20 mV.(c) 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

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Type
research article
DOI
10.1364/OE.480219
Web of Science ID

WOS:000942062500006

Author(s)
Edinger, Pierre
Jo, Gaehun
Nguyen, Chris Phong Van
Takabayashi, Alain Yuji  
Errando-Herranz, Carlos
Antony, Cleitus
Talli, Giuseppe
Verheyen, Peter
Khan, Umar
Bleiker, Simon J.
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Date Issued

2023-02-13

Publisher

Optica Publishing Group

Published in
Optics Express
Volume

31

Issue

4

Start page

6540

End page

6551

Subjects

Optics

•

Optics

•

backscattering

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

Available on Infoscience
March 27, 2023
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/196546
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