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research article

Low-loss and high-index contrast ultraviolet-C free-standing waveguides made of thermal silicon oxide

Su, Chenming
•
Jaramillo Concha, Claudio A.  
•
Lin, Chupao
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July 1, 2024
Optics Letters

Photonics in the ultraviolet provides an avenue for key advances in biosensing, pharmaceutical research, and environmental sensing. However, despite recent progress in photonic integration, a technological solution to fabricate photonic integrated circuits (PICs) operating in the UV-C wavelength range, namely, between 200 and 280 nm, remains elusive. Filling this gap will open opportunities for new applications, particularly in healthcare. A major challenge has been to identify materials with low optical absorption loss in this wavelength range that are at the same time compatible with waveguide design and large-scale fabrication. In this work, we unveil that thermal silicon oxide (TOX) on a silicon substrate is a potential candidate for integrated photonics in the UV-C, by removing the silicon substrate under selected regions to form single-side suspended ridge waveguides. We provide design guidelines for low-loss waveguide geometries, avoiding wrinkling due to residual intrinsic stress, and experimentally demonstrate waveguides that exhibit optical propagation losses below 3 and 4 dB/cm at a wavelength of 266 nm with claddings of air and water, respectively. This result paves the way for on-chip UV-C biological sensing and imaging.

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Type
research article
DOI
10.1364/OL.530364
Scopus ID

2-s2.0-85197570970

PubMed ID

38950267

Author(s)
Su, Chenming

Universiteit Gent

Jaramillo Concha, Claudio A.  

École Polytechnique Fédérale de Lausanne

Lin, Chupao

Universiteit Gent

Quack, Niels

Faculty of Engineering

Galland, Christophe  

École Polytechnique Fédérale de Lausanne

Le Thomas, Nicolas

Universiteit Gent

Date Issued

2024-07-01

Published in
Optics Letters
Volume

49

Issue

13

Start page

3785

End page

3788

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
GR-GA  
LASPE  
FunderFunding(s)Grant NumberGrant URL

Fonds Wetenschappelijk Onderzoek-Onderzoeksproject WEAVE

G033722N

Available on Infoscience
January 24, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/243365
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