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research article

Nanomechanical Membrane-type Surface Stress Sensor

Yoshikawa, Genki
•
Akiyama, Terunobu  
•
Gautsch, Sebastian  
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2011
Nano Letters

Nanomechanical cantilever sensors have been emerging as a key device for real-time and label-free detection of various analytes ranging from gaseous to biological molecules. The major sensing principle is based on the analyte-induced surface stress, which makes a cantilever bend. In this letter, we present a membrane-type surface stress sensor (MSS), which is based on the piezoresistive read-out integrated in the sensor chip. The MSS is not a simple "cantilever," rather it consists of an "adsorbate membrane" suspended by four piezoresistive "sensing beams," composing a full Wheatstone bridge. The whole analyte-induced isotropic surface stress on the membrane is efficiently transduced to the piezoresistive beams as an amplified uniaxial stress. Evaluation of a prototype MSS used in the present experiments demonstrates a high sensitivity which is comparable with that of optical methods and a factor of more than 20 higher than that obtained with a standard piezoresistive cantilever. The finite element analyses indicate that changing dimensions of the membrane and beams can substantially increase the sensitivity further. Given the various conveniences and advantages of the integrated piezoresistive read-out, this platform is expected to open a new era of surface stress-based sensing.

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Type
research article
DOI
10.1021/nl103901a
Web of Science ID

WOS:000288061500023

Author(s)
Yoshikawa, Genki
Akiyama, Terunobu  
Gautsch, Sebastian  
Vettiger, Peter
Rohrer, Heinrich
Date Issued

2011

Publisher

American Chemical Society (ACS)

Published in
Nano Letters
Volume

11

Issue

3

Start page

1044

End page

1048

Subjects

Piezoresistive

•

surface stress

•

finite element analysis (FEA)

•

microcantilever

•

integration

•

optimization

•

Atomic-Force Microscope

•

Cantilever Array

•

Microcantilever

•

Sensitivity

•

Microsensors

•

Resolution

•

Binding

•

Silicon

•

Design

•

Device

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

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SAMLAB  
Available on Infoscience
February 14, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/64276
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