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  4. Ferroelectric Gate on AlGaN/GaN Heterostructures
 
conference paper

Ferroelectric Gate on AlGaN/GaN Heterostructures

Malin, L.  
•
Stolichnov, I.  
•
Muralt, P.  
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2007
15th IEEE International Symposium on Applications of Ferroelectrics 2006
15th IEEE International Symposium on Applications of Ferroelectrics

A PZT, Pb(Zr,Ti)O-3 (40:60), ferroelectric layer has been successfully deposited onto a Al0.3Ga0.7N/GaN heterostructure with a 2DEG, two dimensional electron gas. Due to the chemical and temperature stability of AlGaN/GaN it was possible to implement the concept of field-effect transistor with ferroelectric gate. The high temperature processing conditions for PZT were optimised in order to grow highly textured (111) PZT on the heterostructure without destroying the 2DEG. However, it was imperative to measure the transport properties in the 2DEG before and after the PZT deposition process in order to detect any degradation of the 2DEG due to diffusion. Hall measurements also enabled the observation of the partial depletion of electrons in the 2DEG, confirming the functionality of the ferroelectric gate. This depletion was due to a change of the spontaneous polarisation in the PZT layer when poled with a negatively biased voltage. These results are encouraging for the use of PZT as a ferroelectric gate on AlGaN/GaN heterostructures and may open new possibilities for semiconductor heterostructure nano-patterning by polarisation domain engineering.

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Type
conference paper
DOI
10.1109/ISAF.2006.4387839
Web of Science ID

WOS:000262360900020

Author(s)
Malin, L.  
Stolichnov, I.  
Muralt, P.  
Setter, N.  
Date Issued

2007

Publisher

IEEE

Published in
15th IEEE International Symposium on Applications of Ferroelectrics 2006
Start page

82

End page

85

Subjects

Ferroelectric Gate

•

AlGaN Heterostructures

•

Non-Volatile Memory

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Event nameEvent placeEvent date
15th IEEE International Symposium on Applications of Ferroelectrics

Sunset Beach, NC

JUL 30-AUG 03, 2006

Available on Infoscience
June 25, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/40878
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