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  4. Multimaterial Nanoporous Membranes Shaped through High Aspect-Ratio Sacrificial Silicon Nanostructures
 
research article

Multimaterial Nanoporous Membranes Shaped through High Aspect-Ratio Sacrificial Silicon Nanostructures

Varricchio, Stefano S. G.
•
Piacentini, Niccoló
•
Bertsch, Arnaud
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2017
ACS Omega

We present an innovative fabrication method for solid-state nanoporous membranes based on the casting of sacrificial silicon nanostructures. The process allows the individual definition of geometry and placement of each nanopore through e-beam lithography and is compatible with a wide range of materials without the need to adapt the process to the materials used. We demonstrate the fabrication of membranes integrating high aspect-ratio nanopores with critical dimensions as small as 30 nm, 1.2 μm in length, with round or elongated shapes, and made of silicon dioxide or amorphous carbon. The capability to engineer nanoporous membranes made of a variety of materials and with tailored designs will lead to new applications in the field of electrochemical sensing, flow modulation, or the chemical functionalization of nanopores.

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Type
research article
DOI
10.1021/acsomega.7b00084
Web of Science ID

WOS:000406385100001

Author(s)
Varricchio, Stefano S. G.
Piacentini, Niccoló
Bertsch, Arnaud
Renaud, Philippe
Date Issued

2017

Publisher

Amer Chemical Soc

Published in
ACS Omega
Volume

2

Issue

6

Start page

2387

End page

2394

Subjects

Deposition process

•

Electric properties

•

Microstructure

•

Nanofabrication

•

Nanoporous materials

•

Nanostructures

•

Surface reaction

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS4  
Available on Infoscience
June 23, 2017
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/138597
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