research article
Photonic Damascene Process for Low-Loss, High-Confinement Silicon Nitride Waveguides
Type
research article
Web of Science ID
WOS:000436924400001
Author(s)
Pfeiffer, MHP
Herkommer, C
Liu, J
Morais, T
Zervas, M
Geiselmann, M
Kippenberg, TJ
Date Issued
2018
Volume
24
Issue
4
Article Number
6101411
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
November 8, 2018
Use this identifier to reference this record