research article
Plasma generation by inductive coupling with a planar resonant RF network antenna (vol 45, 082001, 2012)
Type
research article
Web of Science ID
WOS:000309265100016
Author(s)
Lecoultre, S.
Guittienne, Ph
Howling, A. A.
Fayet, P.
Hollenstein, Ch
Date Issued
2012
Publisher
Published in
Volume
45
Issue
40
Article Number
409502
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
Available on Infoscience
February 27, 2013
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