A MEMS tunable phase monitor with integrated photodiode read-out for silicon photonic circuits
Electrostatic MEMS provide low power consumption to programmable photonics. However, the scaling of programmable photonics also requires solutions for circuit monitoring. We demonstrate a MEMS tunable phase monitor with integrated read-out on a foundry platform.
2-s2.0-85192363838
The Royal Institute of Technology (KTH)
École Polytechnique Fédérale de Lausanne
Munster Technological University (MTU)
Interuniversity Microelectronics Centre
Interuniversity Microelectronics Centre
Interuniversity Microelectronics Centre
École Polytechnique Fédérale de Lausanne
The Royal Institute of Technology (KTH)
2023
REVIEWED
EPFL
| Event name | Event acronym | Event place | Event date |
Busan, Korea, Republic of | 2023-07-09 - 2023-07-13 | ||