research article

MEPHISTO spectromicroscope reaches 20 nm lateral resolution

De Stasio, G.
•
Perfetti, L.  
•
Gilbert, B.
Show more
1999
Review of Scientific Instruments

The recently described tests of the synchrotron imaging photoelectron spectromicroscope MEPHISTO (Microscope a Emission de PHotoelectrons par Illumination Synchrotronique de Type Onduleur) were complemented by further resolution improvements and tests, which brought the lateral resolution down to 20 nm. Images and line plot profiles demonstrate such performance. (C) 1999 American Institute of Physics. [S0034-6748(99)04902-3].

Type
research article
DOI
10.1063/1.1149661
Web of Science ID

WOS:000079012100026

Author(s)
De Stasio, G.
Perfetti, L.  
Gilbert, B.
Fauchoux, O.
Capozi, M.
Perfetti, P.
Margaritondo, G.  
Tonner, B. P.
Date Issued

1999

Published in
Review of Scientific Instruments
Volume

70

Issue

3

Start page

1740

End page

1742

Subjects

SYNCHROTRON RADIATION

•

MICROSCOPY

•

SURFACES

Note

Ecole Polytech Fed Lausanne, Inst Phys Appl, CH-1015 Lausanne, Switzerland. CNR, Ist Struttura Mat, I-00133 Rome, Italy. Univ Roma Tor Vergata, Dipartimento Fis, I-00173 Rome, Italy. Univ Wisconsin, Dept Phys, Milwaukee, WI 53211 USA. Sincrotrone Trieste, I-34012 Trieste, Italy. De Stasio, G, Ecole Polytech Fed Lausanne, Inst Phys Appl, CH-1015 Lausanne, Switzerland.

ISI Document Delivery No.: 174AN

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LSE  
LPRX  
Available on Infoscience
October 3, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/234797