Microstructure and Surface and Roughness of Microcrystalline Silicon Prepared by VHF-GD Using Hydrogen Dilution

research article

Microstructure and Surface and Roughness of Microcrystalline Silicon Prepared by VHF-GD Using Hydrogen Dilution

Vallat-Sauvain, E.

•

Kroll, U.

•

Meier, J.

2000

Journal of Non-Crystalline Solids

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