conference paper

Femtosecond Laser Processing of Active and Passive Devices for bio-MEMS

Bellouard, Yves  
2013
2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR)
10th Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)

Femtosecond laser processing of glass has been proven to be an efficient tool for fabricating waveguides and microchannels. Here we show that monolithic integration in bio-Micro- Electro-Mechanical-Systems can be pushed forward by introducing additional functionalities.

Cite this item

Bellouard, Y. (2013). Femtosecond Laser Processing of Active and Passive Devices for bio-MEMS. 2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR). 10th Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR), Kyoto, JAPAN. https://doi.org/10.1109/CLEOPR.2013.6600168

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Type
conference paper
DOI
10.1109/CLEOPR.2013.6600168
Web of Science ID

WOS:000334176100257

Author(s)
Bellouard, Yves  
Date Issued

2013

Publisher

IEEE

Publisher place

New York, NY

Published in
2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR)
ISBN of the book

978-1-4673-6476-8

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
GALATEA  
Event nameEvent placeEvent date
10th Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)

Kyoto, JAPAN

June 30 - July 04, 2013

Available on Infoscience
July 20, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116462