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patent

Junctionless nano-electro-mechanical resonant transistor

Bartsch, Sebastian  
•
Ionescu, Mihai Adrian  
2014

A junctionless Nano-Electro-Mechanical (NEM) resonator, comprising a highly doped conductive channel (4) connecting a drain (9) and a source (10) electrode and movably fixed by at least two ends (11, 11') acting as said source and drain electrodes, respectively at least one fixed gate electrode (3, 3') arranged to control a depletion charge (5) in the highly doped conductive channel (4) thereby modulating dimensions of a cross-section of the highly doped conductive channel (4). A dimension of the cross-section in the direction of an electrical field that is oriented from the fixed gate electrode (3, 3') to the highly doped conductive channel (4), is designed in such a way that it can be reduced under the effect of the depletion charge such that a full depletion in the highly doped conductive channel (4) is achievable with the control of the fixed gate electrode.

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Type
patent
EPO Family ID

48628745

Author(s)
Bartsch, Sebastian  
Ionescu, Mihai Adrian  
TTO classification

TTO:6.1150

EPFL units
NANOLAB  
AVP-R-TTO  
DOICountry codeKind codeDate issued

US9397285

US

B2

2016-07-19

US2015137068

US

A1

2015-05-21

WO2013156978

WO

A3

2014-01-23

WO2013156978

WO

A2

2013-10-24

Available on Infoscience
September 22, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/118428
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