Overstolz, T.Niederer, G.Noell, W.Herzig, H. P.Gale, M. T.Obi, S.Thiele, H.de Rooij, N. F.2009-05-122009-05-122009-05-122004https://infoscience.epfl.ch/handle/20.500.14299/39658MEMS Tilting Platform for Filter Tuning in Optical Telecomtext::conference output::conference proceedings::conference paper