Briand, D.Weber, P.de Rooij, N. F.2009-05-122009-05-122009-05-12200310.1109/SENSOR.2003.1217142https://infoscience.epfl.ch/handle/20.500.14299/39092Metal to Glass Anodic Bonding for Microsystems Packagingtext::conference output::conference proceedings::conference paper