Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform

Rajendran, KhannanPandey, AwanishEdinger, PierreJo, GaehunTakabayashi, Alain YujiKhan, UmarVerheyen, PeterQuack, NielsNiklaus, FrankBogaerts, WimGylfason, Kristinn B.Van Thourhout, Dries2022-05-232022-05-232022-05-232021-01-0110.1109/GFP51802.2021.9673877https://infoscience.epfl.ch/handle/20.500.14299/188057WOS:000783824500029The thermal motion of a vacuum packaged, suspended nano-beam and nanophotonic waveguide on a silicon photonics-MEMS platform is measured. The resonance frequency and Q-factor of the observed mechanical modes are determined. We also experimentally estimate the displacement sensitivity to be 1.779 +/- 0.022 fm/root Hz.Engineering, Electrical & ElectronicOpticsPhysics, AppliedEngineeringOpticsPhysicsoptical forcesThermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platformtext::conference output::conference proceedings::conference paper