Creemer, J.F.Briand, D.Zandbergen, H.W.van der Vlist, W.de Boer, C.R.de Rooij, N.F.Sarro, P.M.2009-11-092009-11-092009-11-09200810.1016/j.sna.2008.08.016https://infoscience.epfl.ch/handle/20.500.14299/44094Microhotplates with TiN heaterstext::journal::journal article::research article