Wu, SongmeiWildhaber, FabienBertsch, ArnaudBrugger, JürgenRenaud, Philippe2013-05-312013-05-312013-05-31201310.1063/1.4807781https://infoscience.epfl.ch/handle/20.500.14299/92511WOS:000320620400065We developed Al2O3/W heterogeneous nanopore arrays for field effect modulated nanofluidic diodes. They are fabricated by transferring self-organized nanopores of anodic aluminium oxide into a W thin film. The nanopores are ∼20 nm in diameter and 400 nm in length. After mild oxidation, approximately 10 nm WO3 grows on the surface of W, forming a conformal and dense dielectric layer. It allows the application of an electrical field through the surrounding W electrode to modulate the ionic transport across the entire membrane. Our experimental findings have potential applications in high throughput controlled delivery and electrostatic sorting of biomolecules.nanofluidic diodenanoporemembranetext::journal::journal article::research article