Vibrating Body Transistors: Enabling Fin-FET Nano-Electro-Mechanical Resonators

Ionescu, Adrian M.2012-01-102012-01-102012-01-10201010.1109/FREQ.2010.5556318https://infoscience.epfl.ch/handle/20.500.14299/76488WOS:000287378700069Vibrating Body Transistors: Enabling Fin-FET Nano-Electro-Mechanical Resonatorstext::conference output::conference proceedings::conference paper