Moser, B.Wasmer, K.Barbieri, L.Michler, J.2019-08-232019-08-232019-08-23200710.1557/jmr.2007.0140https://infoscience.epfl.ch/handle/20.500.14299/160473Strength and fracture of Si micropillars: A new scanning electron microscopy-based micro-compression testtext::journal::journal article::research article