RF MEMS capacitive switch on semi-suspended CPW using low-loss HRS

Fernandes-Bolanos, M.Perruisseau-Carrier, J.Dainesi, P.Ionescu, A.M.2007-08-102007-08-102007-08-102007https://infoscience.epfl.ch/handle/20.500.14299/10082RF MEMS capacitive switch on semi-suspended CPW using low-loss HRStext::conference output::conference proceedings::conference paper