Raeder, H.Tyholdt, F.Booij, W.Calame, F.Ostbo, N. P.Bredesen, R.Prume, K.Rijnders, G.Muralt, P.2008-04-112008-04-112008-04-11200710.1007/s10832-007-9036-3https://infoscience.epfl.ch/handle/20.500.14299/20472WOS:00025179520001911737Taking piezoelectric microsystems from the laboratory to productiontext::journal::journal article::research article