Hoover, D.Kremer, D.2012-07-042012-07-042012-07-042007https://infoscience.epfl.ch/handle/20.500.14299/83549WOS:000254273200070Ultrasonic machining is performed using closed-loop Z-axis position and force control. Micromachining requires tools smaller than 100 micrometers in diameter, necessitating the use of forces in the low mN range.ultrasonic machiningclosed-loop controlmicromachiningvoice-coilfrictionless bearingaerostatic bearingcontactless force measurementPosition ControlMaterial RemovalMilli Newton force measurement and control for micro ultrasonic machiningtext::conference output::conference proceedings::conference paper