Zickar, M.Oudalov, A.Noell, W.Marxer, C.de Rooij, N. F.2009-05-122009-05-122009-05-12200510.1109/OMEMS.2005.1540103https://infoscience.epfl.ch/handle/20.500.14299/40038MEMS compatible Micro-GRIN Lenses for in Plane Beam Manipulationtext::conference output::conference proceedings::conference paper