Pyrolysed carbon resonators – Fabrication and characterization

Amato, LetiziaAmato, BartoloVillanueva, GuillermoEmnéus, J.Heiskanen, A.Keller, S.S.Boisen, A.Schmid, S.2016-03-172016-03-172016-03-172013https://infoscience.epfl.ch/handle/20.500.14299/125031Study of resonators composed of silicon nitride and pyrolysed carbon.Pyrolysed carbon resonators – Fabrication and characterizationtext::conference output::conference poster not in proceedings