Howling, A. A.Hollenstein, C.Paris, P. J.2008-04-162008-04-162008-04-16199110.1063/1.105322https://infoscience.epfl.ch/handle/20.500.14299/21165Contamination due to particles generated and suspended in silane rf plasmas is investigated. Powder is rendered visible by illumination of the reactor volume. This simple diagnostic for global, spatio-temporal powder dynamics is used to study particle formation, trapping, and powder reduction by power modulation.text::journal::journal article::research article