Perruisseau-Carrier, J.Fritschi, R.Skrivervik, A. K.2006-11-302006-11-302006-11-30200510.1109/RME.2005.1543036https://infoscience.epfl.ch/handle/20.500.14299/236686WOS:000234682000042Design of enhanced multi-bit distributed MEMS variable true-time delay linestext::conference output::conference proceedings::conference paper