Herzig, H. P.Nussbaum, P.Dandliker, R.Hugle, W. B.Volkel, R.2013-01-172013-01-172013-01-17199610.1117/1.601080https://infoscience.epfl.ch/handle/20.500.14299/87929flat panel displayscompound eyemicrolensesmicro-opticsmulti-aperture imagingoptical imagesphotolithographyphotoresistsMicrolens array imaging system for photolithographytext::journal::journal article::research article