Dändliker, R.Herzig, H. P.Völkel, R.2009-04-222009-04-222009-04-22200010.1007/978-94-011-4096-6_11https://infoscience.epfl.ch/handle/20.500.14299/37797Microsystems for optical imaging and interconnectstext::book/monograph::book part or chapter