Beam steering system using a 2D MEMS scanner

Petremand, YvesEpitaux, MarcHauffe, RalfNoell, Wilfriedde Rooij, Nico F.2010-04-072010-04-072010-04-07200710.1109/LEOS.2007.4382708https://infoscience.epfl.ch/handle/20.500.14299/49233Beam steering system using a 2D MEMS scannertext::conference output::conference proceedings::conference paper