Genolet, G.Cueni, T.Bernal, M.-P.Despont, M.Staufer, U.Noell, W.Vettiger, P.Marquis-Weible, F.de Rooij, N. F.2009-05-122009-05-122009-05-122000https://infoscience.epfl.ch/handle/20.500.14299/39296Novel micromachined photoplastic probe for scanning near-field optical microscopytext::conference output::conference proceedings::conference paper