Flückiger, Patrick RobertSchneegans, Hubert Pierre-Marie BenoîtPrêcheur-Llarena, Simon HubertBaur, CharlesHenein, Simon2024-08-092024-08-092024-08-092024-06-14https://infoscience.epfl.ch/handle/20.500.14299/240674Typical flexure-based XY-stages have a serial design, and their layout results in the flexures being loaded in flection in face of heavy payloads or vertical loads. This paper presents a design with zero parasitic shift in which all flexures are loaded in traction/compression, resulting in a high-precision and high-load-capacity flexure-based XY-stage. A proof-of-concept demonstrator validates the concept and numerical simulations indicates sub-micron straightness error.enFlexureXY-stagehigh precisionstraightnesscompliant mechanismtext::conference output::conference proceedings::conference paper